F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive 本スタンダードは，global Physical Interfaces & Carriers

本スタンダードは，global Physical Interfaces & Carriers Committeeで技術的に承認されている。現版は2010年8月27日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年10月に www

SEMI E87-0619 (technical revision)

1  This Guide may be used:

SEMI F85 — Specification for Dimension of One Port Components for 1

• ドライエッチ装置

F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive 本スタンダードは，global Physical Interfaces & CarriersThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www. semi. org September 2001; to be published November 2001. Originally published in 1993. The purpose of this document is to provide a guide for the design and operational requirements